Micromachined Accelerometer ± 40g Amplified , Inc

The MMAS40G family of silicon capacitive, micromachined Accelerometers features integral signal amplification, Signal Conditioning a 4pole lowpass Filter and temperature compensation. ZeroG offset, full scale span and Filter rolloff are factory set and require no external passives. A calibrated selftest feature mechanically displaces the seismic mass with the application of a digital selftest signal. The MMAS40G incorporates a single polysilicon seismic mass, suspended between two fixed polysilicon plates (Gcell). The forces of acceleration move the seismic mass, thereby resulting in a change in capacitance. The Gcell is sealed at the wafer level, creating a particlefree environment. The Gcell features builtin damping and overrange stops to protect it from mechanical shock. MMAS40G Accelerometers are ideally suited for automotive crash detection and recording, vibration monitoring, automotive suspension control, appliance control systems, etc. By Freescale Semiconductor, Inc