200 KPa On-Chip Temperature Compensated And Calibrated Silicon Pressure Sensors

The MPMZ2202 device is a silicon piezoresistive Pressure Sensor providing a highly accurate and linear voltage output directly proportional to the applied pressure. The Sensor is a single, monolithic silicon diaphragm with the strain gauge and a thin-film resistor network integrated on-chip. The chip is laser trimmed for precise span and offset calibration and temperature compensation. By Freescale Semiconductor, Inc